THALES – SESO® Optics for Semiconductor EUV Equipment
THALES - SESO® Optics for Semiconductor EUV Equipment LUXEM EUV ultrafast microscope featured in the company brochure of SESO Thales. Tailored figure error optics mark a disruptive advance in illumination function quality and stability, improving throughput in EUV ultrafast nanometrology. Find out more











